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Advanced FIB & TEM For Wafers Analysis

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    2026-10-17 03:24

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GRG METROLOGY & TEST GROUP CO., LTD.

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Contact:colecy(Ms.)  

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Address:No.8 Chuangyun Road, Shiqi Town, Panyu District, Guangzhou City,China

Website: http://b0f02837.kwgbzy.com/

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GRGTEST Metrology possesses patented technologies including methods for eliminating the curtain effect of the FIB focused ion beam, a novel framework structure method for preparing heat-sensitive TEM ultrathin samples using DB FIB, a FIB step-thinning method for preparing ultrathin TEM samples of brittle and easily cracked materials, a focused ion beam ultrathin sectioning pretreatment method for radiation-sensitive fine-structure wafer samples, and a method for preparing TEM samples using FIB inverted cutting. These technologies enable high-resolution TEM images with no electron beam damage, achieving atomic-level resolution morphological characterization and compositional analysis of advanced process chips.
link:http://www.grgtmall.net